Small Ion Beam Milling Device "IM Series"
Introducing a compact ion milling device that allows for a variety of rich chucking methods.
The "IM Series" is a compact ion beam milling device suitable for research and development as well as small-scale production. It has a compact footprint and is equipped with an endpoint detection system (optional for load lock). We offer free initial sample processing tailored to your application. Please contact us for information regarding wafer sizes, processing quantities, and more. 【Features】 ■ Capable of high-rate etching and low-rate control ■ Rotating and tilting wafer holder ■ A variety of chucking methods available ■ Compact footprint ■ Equipped with an endpoint detection system (optional for load lock) ■ Filamentless μ-wave neutralizer (optional) *For more details, please refer to the external link or feel free to contact us.
- Company：日立ハイテク
- Price：Other
